JPH0247484Y2 - - Google Patents
Info
- Publication number
- JPH0247484Y2 JPH0247484Y2 JP17059485U JP17059485U JPH0247484Y2 JP H0247484 Y2 JPH0247484 Y2 JP H0247484Y2 JP 17059485 U JP17059485 U JP 17059485U JP 17059485 U JP17059485 U JP 17059485U JP H0247484 Y2 JPH0247484 Y2 JP H0247484Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- pressing
- pressing body
- receiving surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17059485U JPH0247484Y2 (en]) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17059485U JPH0247484Y2 (en]) | 1985-11-06 | 1985-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6279147U JPS6279147U (en]) | 1987-05-20 |
| JPH0247484Y2 true JPH0247484Y2 (en]) | 1990-12-13 |
Family
ID=31105460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17059485U Expired JPH0247484Y2 (en]) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247484Y2 (en]) |
-
1985
- 1985-11-06 JP JP17059485U patent/JPH0247484Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6279147U (en]) | 1987-05-20 |